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Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization. Invited paper
Authors: Gans, T.; Osiac, M.; O'Connell, D.; Kadetov, V. A.; Czarnetzki, U.; Schwarz-Selinger, T.; Halfmann, H.; Awakowicz, P.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Plasma Physics and Controlled Fusion
Volume: 47
Issue / Number: 5A
Start Page: A353
End Page: A360
Document Type: Article
ID: 220885.0
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