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Entries: 1-5  
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Operational limit of a planar DC magnetron cluster source due to target erosion
Authors: Rai, A.; Mutzke, A.; Bandelow, G.; Schneider, R.; Ganeva, M.; Pipa, A.; Hippler, R.
Date of Publication (YYYY-MM-DD): 2013
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 316
Start Page: 6
End Page: 12
Document Type: Article
ID: 655978.0
 
Full text / Content available
Modeling of altered layer formation during reactive ion etching of GaAs
Authors: Mutzke, A.; Rai, A.; Schneider, R.; Angelin, E.; Hippler, R.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Applied Surface Science
Volume: 263
Start Page: 626
End Page: 632
Document Type: Article
ID: 614876.0
 
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Behavior of a porous particle in a radiofrequency plasma under pulsed argon ion beam bombardment
Authors: Wiese, R.; Sushkov, V.; Kersten, H.; Ikkurthi, V. R.; Schneider, R.; Hippler, R.
Date of Publication (YYYY-MM-DD): 2010
Title of Journal: New Journal of Physics
Volume: 12
Sequence Number of Article: 033036 (20pp)
Document Type: Article
ID: 475001.0
 
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Chemical Reaction Studies in CH4/Ar and CH4/N2 Gas Mixtures of a Dielectric Barrier Discharge
Authors: Majumdar, A.; Behnke, J. F.; Hippler, R.; Matyash, K.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Journal of Physical Chemistry A
Volume: 109
Start Page: 9371
End Page: 9377
Document Type: Article
ID: 245134.0
The energy influx during plasma deposition of amorphous hydrogenated carbon films
Authors: Rohde, D.; Pecher, R.; Kersten, H.; Jacob, W.; Hippler, R.
Date of Publication (YYYY-MM-DD): 2002
Title of Journal: Surface & Coatings Technology
Volume: 149
Issue / Number: 2-3
Start Page: 206
End Page: 216
Document Type: Article
ID: 21158.0
Entries: 1-5  
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