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Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering
Authors: Krause, B.; Darma, S.; Kaufholz, M.; Graefe, H. H.; Ulrich, S.; Mantilla, M.; Weigel, R.; Rembold, S.; Baumbach, T.
Date of Publication (YYYY-MM-DD): 2012-03
Title of Journal: Journal of Synchrotron Radiation
Volume: 19
Start Page: 216
End Page: 222
Document Type: Article
ID: 609560.0
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