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Concentration of N and P in SIC investigated by time-of-flight secondary ion mass spectrometry (TOF-SIMS)
Authors: Acartürk, T.; Semmelroth, K.; Pensl, G.; Saddow, S. E.; Starke, U.
Date of Publication (YYYY-MM-DD): 2005
Title of Journal: Materials Science Forum
Volume: 483-485
Start Page: 453
End Page: 456
Document Type: Article
ID: 244368.0
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