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Probing by in situ scanning tunneling microscopy the influence of an organic additive on Si etching in NaOH
Authors: Allongue, Philippe; Bertagna, Valérie; Kieling, Virginia; Gerischer, Heinz
Date of Publication (YYYY-MM-DD): 1994-05
Title of Journal: Journal of Vacuum Science & Technology B
Volume: 12
Issue / Number: 3
Start Page: 1539
End Page: 1542
Document Type: Article
ID: 430373.0
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