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Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF Plasma
Authors: Osiac, M.; Schwarz-Selinger, T.; O'Connell, D.; Heil, B.; Petrovic, Z. L.; Turner, M. M.; Gans, T.; Czarnetzki, U.
Date of Publication (YYYY-MM-DD): 2007
Title of Journal: Plasma Sources Science Technology
Volume: 16
Start Page: 355
End Page: 363
Document Type: Article
ID: 321205.0
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