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Microstructure of thermal hillocks on blanket Al thin films
Authors: Kim, D.; Heiland, B.; Nix, W. D.; Arzt, E.; Deal, M. D.; Plummer, J. D.
Date of Publication (YYYY-MM-DD): 2000
Title of Journal: Thin Solid Films
Volume: 371
Start Page: 278
End Page: 282
Document Type: Article
ID: 198853.0


Diffusional Hillock formation in Al thin films contolled by creep
Authors: Kim, D.; Nix, W. D.; Arzt, E.; Deal, M. D.; Plummer, J. D.
Place of Publication: Warrendale/PA
Publisher: MRS
Date of Publication (YYYY-MM-DD): 2000
Name of Conference/Meeting: Thin Films: Stresses and Mechanical Properties VIII. Symposium V at the 1999 MRS Fall Meeting
Title of Proceedings: Thin Films: Stresses and Mechanical Properties VIII
Start Page: 129
End Page: 134
Title of Series: Materials Research Symposium Proceedings
Volume (in Series): 594
Document Type: Conference-Paper
ID: 198959.0