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Ion beam lithography for direct patterning of high accuracy large area X-ray elements in gold on membranes
Authors: Nadzeyka, A.; Peto, L.; Bauerdick, S.; Mayer, M.; Keskinbora, K.; Grévent, C.; Weigand, M.; Hirscher, M.; Schütz, G.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Microelectronic Engineering
Volume: 98
Start Page: 198
End Page: 201
Document Type: Article
ID: 618623.0