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Quasi-linear versus nonlinear shadowing growth
Authors: Manz, P.; Fedorczak, N.; Dittmar, T.; Baloniak, T.; Keudell, A. von
(Start) Date of Event
(YYYY-MM-DD):
 2013-02-25
Name of Conference/Meeting: DPG-Frühjahrstagung
Document Type: Poster
ID: 637123.0


Nonlinear evolution of surface morphology under shadowing
Authors: Manz, P.; Fedorczak, N.; Dittmar, T.; Baloniak, T.; Keudell, A. von
Date of Publication (YYYY-MM-DD): 2013
Title of Journal: Physical Review E
Volume: 87
Sequence Number of Article: 042404 (8pp)
Document Type: Article
ID: 655552.0


Thermally induced changes in the hydrogen microstructure of amorphous hydrogenated silicon films, analyzed using in situ real time infrared spectroscopy
Authors: Keudell, A. von; Abelson, J. R.
Date of Publication (YYYY-MM-DD): 1999
Title of Journal: Japanese Journal of Applied Physics. Part 1
Volume: 38
Issue / Number: 7A
Start Page: 4002
End Page: 4006
Document Type: Article
ID: 625562.0


Direct insertion of SiH3 radicals into strained Si-Si surface bonds during plasma deposition of hydrogenated amorphous silicon films
Authors: Keudell, A. von; Abelson, J. R.
Date of Publication (YYYY-MM-DD): 1999
Title of Journal: Physical Review B
Volume: 59
Issue / Number: 8
Start Page: 5791
End Page: 5798
Document Type: Article
ID: 626155.0


Erosion of thin hydrogenated carbon films in oxygen, oxygen/hydrogen and water plasmas
Authors: Landkammer, B.; Keudell, A. von; Jacob, W.
Date of Publication (YYYY-MM-DD): 1999
Title of Journal: Journal of Nuclear Materials
Volume: 264
Issue / Number: 1-2
Start Page: 48
End Page: 55
Document Type: Article
ID: 626420.0


Surface Mechanism during Growth of a-Si:H Films from Low Temperature Plasmas
Authors: Keudell, A. von
Date of Publication (YYYY-MM-DD): 1999
Name of Conference/Meeting: 14th International Symposium on Plasma Chemistry
Title of Proceedings: 14th International Symposium on Plasma Chemistry
Start Page: 1263
End Page: 1265
Volume (in Series): 3
Document Type: Conference-Paper
ID: 630832.0


The interaction of atomic hydrogen with very thin amorphous hydrogenated silicon films analyzed using in situ real time infrared spectroscopy: Reaction rates and the formation of hydrogen platelets
Authors: Keudell, A. von; Abelson, J. R.
Date of Publication (YYYY-MM-DD): 1998
Title of Journal: Journal of Applied Physics
Volume: 84
Issue / Number: 1
Start Page: 489
End Page: 495
Document Type: Article
ID: 627763.0


Surface reactions during plasma-enhanced chemical vapor deposition of hydrocarbon films
Authors: Keudell, A. von
Date of Publication (YYYY-MM-DD): 1997
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 125
Issue / Number: 1-4
Start Page: 323
End Page: 327
Document Type: Article
ID: 624766.0


Interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate
Authors: Keudell, A. von; Jacob, W.
Date of Publication (YYYY-MM-DD): 1997
Title of Journal: Journal of Vacuum Science and Technology A
Volume: 15
Issue / Number: 2
Start Page: 402
End Page: 407
Document Type: Article
ID: 624781.0


Surface relaxation during plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated by in situ ellipsometry
Authors: Keudell, A. von; Jacob, W.
Date of Publication (YYYY-MM-DD): 1997
Title of Journal: Journal of Applied Physics
Volume: 81
Issue / Number: 3
Start Page: 1531
End Page: 1535
Document Type: Article
ID: 625187.0