Mayer, M., W. Eckstein, H. Langhuth, F. Schiettekatte, U. von Toussaint and F. Mathis: Computer Simulation of Ion Beam Analysis: Possibilities and Limitations. (Seminar Talk, Peking University, 2012-11-14, Beijing).
Bizyukov, I., A. Mutzke, M. Mayer, H. Langhuth, K. Krieger and R. Schneider: Macroscopic parameters of the interaction of an Ar+ ion beam with a Si pitch grating. In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 278, 4-7 (2012).
doi: 10.1016/j.nimb.2012.01.038
url: http://dx.doi.org/10.1016/j.nimb.2012.01.038
Mutzke, A., I. Bizyukov, H. Langhuth, M. Mayer, K. Krieger and R. Schneider: Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level. In: Nuclear Instruments and Methods in Physics Research B 293, 11-15 (2012).
doi: 10.1016/j.nimb.2012.09.017
url: http://dx.doi.org/10.1016/j.nimb.2012.09.017
Mayer, M., W. Eckstein, H. Langhuth, F. Schiettekatte and U. von Toussaint: Computer simulation of ion beam analysis: Possibilities and limitations. In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 269, 24, 3006-3013 (2011).
doi: 10.1016/j.nimb.2011.04.066
url: http://dx.doi.org/10.1016/j.nimb.2011.04.066
Langhuth, H., M. Mayer and S. Lindig: Layer Morphology Analysis of Sputter-eroded Silicon Gratings using Rutherford Backscattering. In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 269, 16, 1811-1817 (2011).
doi: 10.1016/j.nimb.2011.05.002
url: http://www.sciencedirect.com/science/article/pii/S0168583X11004952
Mayer, M., W. Eckstein, H. Langhuth, F. Schiettekatte and U. von Toussaint: Computer Simulation of Ion Beam Analysis: Possibilities and Limitations. (10th European Conference on Accelerators in Applied Research and Technology, 2010-09-13 to 2010-09-17, Athens).
Schneider, R., A. Mutzke, I. Bizyukov, J. Davis, A. Haasz, H. Langhuth and K. Krieger: Bombardment of a Si pitch grating by C+ ions at an incident angle parallel to the structure. (19th Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI 19), 2010-05-24 to 2010-05-28, San Diego, CA).
http://edoc.mpg.de
The Max Planck Society does not take any responsibility for the content of this export.