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Computer Simulation of Ion Beam Analysis: Possibilities and Limitations
Authors: Mayer, M.; Eckstein, W.; Langhuth, H.; Schiettekatte, F.; Toussaint, U. von; Mathis, F.
(Start) Date of Conference/Meeting
(YYYY-MM-DD):
 2012-11-14
Name of Conference/Meeting: Seminar Talk, Peking University
Place of Conference/Meeting: Beijing
Document Type: Talk at Event
ID: 628171.0


Macroscopic parameters of the interaction of an Ar+ ion beam with a Si pitch grating
Authors: Bizyukov, I.; Mutzke, A.; Mayer, M.; Langhuth, H.; Krieger, K.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 278
Start Page: 4
End Page: 7
Document Type: Article
ID: 579514.0


Study of interaction of C+ ion beam with a Si pitch grating on a macro-scale level
Authors: Mutzke, A.; Bizyukov, I.; Langhuth, H.; Mayer, M.; Krieger, K.; Schneider, R.
Date of Publication (YYYY-MM-DD): 2012
Title of Journal: Nuclear Instruments and Methods in Physics Research B
Volume: 293
Start Page: 11
End Page: 15
Document Type: Article
ID: 610426.0


Computer simulation of ion beam analysis: Possibilities and limitations
Authors: Mayer, M.; Eckstein, W.; Langhuth, H.; Schiettekatte, F.; von Toussaint, U.
Date of Publication (YYYY-MM-DD): 2011
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 269
Issue / Number: 24
Start Page: 3006
End Page: 3013
Document Type: Article
ID: 494452.0


Layer Morphology Analysis of Sputter-eroded Silicon Gratings using Rutherford Backscattering
Authors: Langhuth, H.; Mayer, M.; Lindig, S.
Date of Publication (YYYY-MM-DD): 2011
Title of Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume: 269
Issue / Number: 16
Start Page: 1811
End Page: 1817
Document Type: Article
ID: 535382.0


Computer Simulation of Ion Beam Analysis: Possibilities and Limitations
Authors: Mayer, M.; Eckstein, W.; Langhuth, H.; Schiettekatte, F.; von Toussaint, U.
(Start) Date of Conference/Meeting
(YYYY-MM-DD):
 2010-09-13
Name of Conference/Meeting: 10th European Conference on Accelerators in Applied Research and Technology
Place of Conference/Meeting: Athens
Document Type: Talk at Event
ID: 475206.0


Bombardment of a Si pitch grating by C+ ions at an incident angle parallel to the structure
Authors: Schneider, R.; Mutzke, A.; Bizyukov, I.; Davis, J.; Haasz, A.; Langhuth, H.; Krieger, K.
(Start) Date of Event
(YYYY-MM-DD):
 2010-05-24
Name of Conference/Meeting: 19th Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI 19)
Document Type: Poster
ID: 475847.0