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Patterned DBD pretreatment at ambient pressure for low-temperature
wafer bonding
Authors: Eichler, M.; Michel, B.; Thomas, M.; Ruddy, C.; Reinecke, H.; Reiche, M.; Gabriel, M.; Klages, C. P.
Place of Publication: Japonsko, Japan
Date of Publication (YYYY-MM-DD): 2006
Title of Proceedings: Proceedings 10th International Symposium on High Pressure Low
Temperature Plasma Chemistry (HAKONE X)
Start Page: 322
End Page: 325
Document Type: Conference-Paper
ID: 312792.0