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Electrochemical micromachining of p-type silicon
Authors: Allongue, Philippe; Jiang, Peng; Kirchner, Viola; Trimmer, Andrew L.; Schuster, Rolf
Date of Publication (YYYY-MM-DD): 2004-07-03
Title of Journal: Journal of Physical Chemistry B
Volume: 108
Issue / Number: 38
Start Page: 14434
End Page: 14439
Document Type: Article
ID: 208304.0


Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses
Authors: Trimmer, Andrew L.; Hudson, John L.; Kock, Matthias; Schuster, Rolf
Date of Publication (YYYY-MM-DD): 2003-05-12
Title of Journal: Applied Physics Letters
Volume: 82
Issue / Number: 19
Start Page: 3327
End Page: 3329
Document Type: Article
ID: 23674.0